MetadatenAuthor: | Finn Zahari, Felix Schlichting, Julian Strobel, Sven Dirkmann, Julia Cipo, Sven Gauter, Jan TrieschmannORCiD, Richard Marquardt, Georg Haberfehlner, Gerald Kothleitner, Lorenz Kienle, Thomas MussenbrockORCiDGND, Martin Ziegler, Holger Kersten, Hermann Kohlstedt |
---|
DOI: | https://doi.org/10.1116/1.5119984 |
---|
ISSN: | 1520-8559 |
---|
Title of the source (English): | Journal of Vacuum Science & Technology |
---|
Document Type: | Scientific journal article peer-reviewed |
---|
Language: | English |
---|
Year of publication: | 2019 |
---|
Volume/Year: | 37 |
---|
Issue number: | 6 |
---|
First Page: | 061203 |
---|
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Theoretische Elektrotechnik |
---|