Scanning Probe studies of the electrical activity at interfaces formed by silicon wafer direct bonding
Author: | Markus Ratzke, Xuegong Yu, Oleg F. Vyvenko, Jürgen ReifGND, Martin Kittler, Manfred Reiche |
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ISSN: | 1610-1634 |
Title of the source (English): | Physica Status Solidi C |
Document Type: | Article |
Language: | English |
Year of publication: | 2007 |
Volume/Year: | 4 |
Issue number: | 8 |
First Page: | 2893 |
Last Page: | 3897 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Experimentalphysik und funktionale Materialien |
Institution name at the time of publication: | Fakultät für Mathematik, Naturwissenschaften und Informatik (eBTU) / LS Experimentalphysik / Materialwissenschaften |