MetadatenAuthor: | Jürgen ReifGND, Florenta Adriana CostacheGND, Sebastian Eckert, Simona Kouteva-Arguirova, Michael BestehornGND, Ionut Georgescu, A. F. Semorek, P. Martin, O. Gobert, Winfried Seifert |
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ISBN: | 0-8194-5623-3 |
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Title of the source (English): | Fifth International Symposium on Laser Precision Microfabrication, 11 - 14 May, 2004, Nara, Japan |
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Publisher: | SPIE |
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Place of publication: | Bellingham, Wash. |
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Document Type: | Conference Proceeding |
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Language: | English |
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Year of publication: | 2004 |
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First Page: | S. 737 |
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Series ; volume number: | Proceedings of SPIE ; 5662 |
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Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Experimentalphysik und funktionale Materialien |
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