Electrostatic all-silicon MEMS audio transducer for in-ear audio applications – acoustic measurements and modelling approach
Author: | Lutz Ehrig, Hermann Schenk, Franziska Wall, Anton MelnikovORCiD, Michael Stolz, Sergiu Langa, Bert Kaiser, Holger Conrad |
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DOI: | https://doi.org/10.18154/RWTH-CONV-239893 |
Title of the source (English): | 23rd International Congress on Acoustics, Aachen, Germany, 2019 |
Document Type: | Conference publication not peer-reviewed |
Language: | English |
Year of publication: | 2019 |
Number of pages: | 6 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Mikro- und Nanosysteme |