Nanoscale topography of thermally-grown oxide films at right-angled convex corners of silicon
Author: | Ali Fatih Sarioglu, Mario Kupnik, Srikant Vaithilingam, Butrus T. Khuri-Yakub |
---|---|
DOI: | https://doi.org/10.1149/2.005202jes |
ISSN: | 0013-4651 |
Title of the source (English): | Journal of The Electrochemical Society |
Document Type: | Scientific journal article peer-reviewed |
Language: | English |
Year of publication: | 2012 |
Volume/Year: | 159 |
Issue number: | 2 |
First Page: | 79 |
Last Page: | 84 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Elektronische Systeme und Sensorik |
Institution name at the time of publication: | Fakultät für Maschinenbau, Elektrotechnik und Wirtschaftsingenieurwesen (eBTU) / LS Allgemeine Elektrotechnik und Messtechnik |