• search hit 22 of 26
Back to Result List

Highly Modular Microsystem Inchworm Motor Based on a Nanoscopic Electrostatic Drive

  • We present results for a microsystem inchworm motor based on Nanoscopic Electrostatic Drive (NED) actuators, fabricated by single crystalline silicon bulk micro-machining on a silicon-on-insulator (SOI) wafer. Actuator elements can easily be added to or removed from the inchworm drive allowing a high adaptability of force and contact area with the movable surface as well as an efficient use of the system’s footprint. In principle, travel ranges of several mm can be easily obtained due to very modular design of the system. The presented inchworm drive is capable of controllable motion up to 1 mm and can generate a force of 1.4 mN at 130V corresponding to a force density of 0.8 mN/mm2 with an average maximum DC power consumption of 11.8 muW in each cycle. Furthermore, the voltage-displacement characteristics of the actuator element was validated by finite element method (FEM).

Export metadata

Additional Services

Search Google Scholar
Metadaten
Author: Harald SchenkORCiD, Keyvan Narimani, Michael Scholles, Shashank Shashank, Sergiu Langa, Roberto Pineda Gomez, Christine Ruffert
URL:https://www.vde-verlag.de/proceedings-de/455656160.html
ISBN:978-3-8007-5656-8
ISBN:978-3-8007-5657-5
Title of the source (English):MikroSystemTechnik Kongress 2021 : Mikroelektronik / Mikrosystemtechnik und ihre Anwendungen Innovative Produkte für zukunftsfähige Märkte 08. – 10. November 2021, Stuttgart-Ludwigsburg
Publisher:VDE e.V.
Document Type:Conference publication not peer-reviewed
Language:English
Year of publication:2021
Number of pages:4
Faculty/Chair:Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Mikro- und Nanosysteme
Einverstanden ✔
Diese Webseite verwendet technisch erforderliche Session-Cookies. Durch die weitere Nutzung der Webseite stimmen Sie diesem zu. Unsere Datenschutzerklärung finden Sie hier.