Luminescence of Crystal Defects Formed after Annealing of Phosphorus Implanted Silicon
Author: | Tzanimir V. ArguirovGND, Martin Kittler, Winfried Seifert, Jürgen ReifGND, D. Bolze, K.-E. Ehwald, Peter Formanek |
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ISSN: | 1012-0394 |
Title of the source (English): | Solid State Phenomena |
Document Type: | Article |
Language: | English |
Year of publication: | 2004 |
Volume/Year: | 95-96 |
First Page: | 289 |
Last Page: | 296 |
Comment: | Proceedings of the GADEST 2003 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Experimentalphysik und funktionale Materialien |
Institution name at the time of publication: | Fakultät für Mathematik, Naturwissenschaften und Informatik (eBTU) / LS Experimentalphysik / Materialwissenschaften |