MetadatenAuthor: | Sergiu Langa, Holger Conrad, Bert Kaiser, Michael Stolz, Matthieu Gaudet, Sebastian Uhlig, Klaus Schimmanz, Harald SchenkORCiD |
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DOI: | https://doi.org/10.1007/s00542-017-3360-6 |
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ISSN: | 1432-1858 |
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Title of the source (English): | Microsystem Technologies |
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Document Type: | Scientific journal article peer-reviewed |
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Language: | English |
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Year of publication: | 2017 |
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Volume/Year: | 23 |
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Issue number: | 1 |
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First Page: | 5697 |
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Last Page: | 5708 |
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Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Mikro- und Nanosysteme |
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