Nonlinear electron resonance heating in asymmetric capacitive discharges
Author: | Sebastian Wilczek, Ralf Peter Brinkmann, Thomas MussenbrockORCiDGND |
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DOI: | https://doi.org/10.1109/PLASMA.2016.7534107 |
ISBN: | 978-1-4673-9601-1 |
Title of the source (English): | 2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016 |
Publisher: | IEEE |
Place of publication: | Piscataway, NJ |
Document Type: | Conference Proceeding |
Language: | English |
Year of publication: | 2016 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Theoretische Elektrotechnik |