Test Method for Contactless On-wafer MEMS Characterization and Production Monitoring
Author: | Sarah Linz, Florian Oesterle, Stefan Lindner, Sebastian Mann, Robert Weigel, Alexander Kölpin |
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DOI: | https://doi.org/10.1109/TMTT.2016.2612664 |
ISSN: | 0018-9480 |
ISSN: | 1557-9670 |
Title of the source (English): | IEEE Transactions on Microwave Theory and Techniques |
Document Type: | Scientific journal article peer-reviewed |
Language: | English |
Year of publication: | 2016 |
Volume/Year: | 64 |
Issue number: | 11 |
First Page: | 3918 |
Last Page: | 3926 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Elektronische Systeme und Sensorik |