Misfit dislocation-free epitaxial growth of SiGe on compliant nanostructured Silicon
Author: | Peter Zaumseil, Markus Andreas Schubert, Yuji Yamamoto, Oliver Skibitzki, Giovanni CapelliniORCiD, Thomas Schröder |
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DOI: | https://doi.org/10.4028/www.scientific.net/SSP.242.402 |
ISSN: | 1662-9779 |
ISSN: | 0377-6883 |
Title of the source (English): | Solid State Phenomena |
Document Type: | Scientific journal article peer-reviewed |
Language: | English |
Year of publication: | 2016 |
Volume/Year: | 242 |
First Page: | 402 |
Last Page: | 407 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Halbleitermaterialien |