MetadatenAuthor: | Jan Grahmann, Michael Wildenhain, Thomas Grashoff, Christian Gerwig, Hans-Georg Dallmann, Alexander Wolter, Harald SchenkORCiD |
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URL: | http://dx.doi.org/10.1117/12.910671 |
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ISBN: | 978-0-8194-8930-2 |
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Title of the source (English): | SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012 |
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Publisher: | SPIE, The Society of Photo-Optical Instrumentation Engineers |
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Place of publication: | Bellingham |
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Document Type: | Conference Proceeding |
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Language: | English |
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Year of publication: | 2012 |
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Contributing Corporation: | Fraunhofer IPMS |
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Issue number: | 1. Auflage |
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First Page: | 825205-1 |
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Last Page: | 825205-9 |
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Series ; volume number: | Proceedings of SPIE ; 8252 |
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Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Mikro- und Nanosysteme |
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Institution name at the time of publication: | Fakultät für Mathematik, Naturwissenschaften und Informatik (eBTU) / LS Mikro- und Nanosysteme |
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