MetadatenAuthor: | Thilo Sandner, Thomas Grashoff, E. Gaumont, Harald SchenkORCiD, Andreas Kenda |
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ISSN: | 1932-5134 |
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Title of the source (English): | Journal of Micro/Nanolithography, MEMS, and MOEMS |
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Document Type: | Scientific journal article not peer-reviewed |
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Language: | English |
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Year of publication: | 2014 |
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Contributing Corporation: | Fraunhofer IPMS |
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Volume/Year: | 13 |
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Issue number: | 1 |
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First Page: | 011115-1 |
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Last Page: | 011115-14 |
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Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Mikro- und Nanosysteme |
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Institution name at the time of publication: | Fakultät für Mathematik, Naturwissenschaften und Informatik (eBTU) / LS Mikro- und Nanosysteme |
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