MEMS transducer for interacting with a volume flow of a fluid, and method for producing the same
Author: | Harald SchenkORCiD, Holger Conrad |
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URL: | https://www.freepatentsonline.com/11554950.html |
Document Type: | Patent |
Language: | English |
Year of publication: | 2023 |
Patent number: | US 11,554,950 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Mikro- und Nanosysteme |