Ion-sensitive structure and method for producing the same
Author: | Eberhard Kurth, Christian Kunath, Harald SchenkORCiD |
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URL: | https://register.dpma.de/DPMAregister/pat/register?AKZ=1020152049213 |
Document Type: | Patent |
Language: | English |
Year of publication: | 2023 |
Patent number: | DE 10 2015 204 921 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Mikro- und Nanosysteme |