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A non-destructive electro-acoustic method to characterize the pull-in voltage of electrostatic actuators

  • For electrostatic actuators, the pull-in marks an upper limit for the operation range. Once reached, the electrodes come into contact and are shorted without further protection. A non-destructive measurement technique to predict this failure mode is of high interest to allow, e.g. fabrication monitoring or reliability studies. To this end, we develop a surprisingly simple nonlinear lumped parameter model (LPM) for a rather complex electrostatic actuator, designed for an in-ear loudspeaker application. It turns out that a single degree-of-freedom model with only one parameter is sufficient. Our key approach is to experimentally determine this free model parameter by analysing harmonic distortions at low frequencies. Harmonic distortions are a very sensitive tool for nonlinearities. Our method is suggested by simulations with a 2D stationary finite element method (FEM), demonstrating how the analysis of harmonic distortions for voltages far below the pull-in can predict not only the DC pull-in but also the quasi-static AC pull-inFor electrostatic actuators, the pull-in marks an upper limit for the operation range. Once reached, the electrodes come into contact and are shorted without further protection. A non-destructive measurement technique to predict this failure mode is of high interest to allow, e.g. fabrication monitoring or reliability studies. To this end, we develop a surprisingly simple nonlinear lumped parameter model (LPM) for a rather complex electrostatic actuator, designed for an in-ear loudspeaker application. It turns out that a single degree-of-freedom model with only one parameter is sufficient. Our key approach is to experimentally determine this free model parameter by analysing harmonic distortions at low frequencies. Harmonic distortions are a very sensitive tool for nonlinearities. Our method is suggested by simulations with a 2D stationary finite element method (FEM), demonstrating how the analysis of harmonic distortions for voltages far below the pull-in can predict not only the DC pull-in but also the quasi-static AC pull-in voltages at different working points. The distortion analysis of electrostatic actuator ensembles therefore seems a viable route for their non-destructive characterization in the nonlinear domain.show moreshow less

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Metadaten
Author: Franziska Wall, Hermann A. G. Schenk, Anton MelnikovORCiD, Bert Kaiser, Harald SchenkORCiD
URL:https://link.springer.com/article/10.1007/s11071-023-08811-1
DOI:https://doi.org/10.1007/s11071-023-08811-1
ISSN:1573-269X
ISSN:0924-090X
Title of the source (English):Nonlinear Dynamics
Document Type:Scientific journal article peer-reviewed
Language:English
Year of publication:2023
Tag:Electrostatic actuator; Harmonic distortions; Microspeaker; Pull-in
Volume/Year:111
Issue number:19
First Page:17809
Last Page:17818
Way of publication:Open Access
Faculty/Chair:Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Mikro- und Nanosysteme
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