Micro-scanning mirrors for high-power laser applications in laser surgery
- We present two novel micro scanning mirrors with large aperture and HR dielectric coatings suitable for high power laser applications in a miniaturized laser instrument. An electrostatic driven 2D-raster scanning mirror with 5×7.1mm aperture is used for dynamic steering of the ps-laser beam of the laser cutting process. A second magnetic 2D-beam steering mirror enables a static beam correction of a hand guided laser instrument. Optimizations of a magnetic gimbal micromirror with 6 mm × 8 mm mirror plate are presented; here static deflections of 3° were reached. Both MEMS devices were successfully tested with a high power ps-laser at 532nm up to 20W CW.
Author: | Thilo Sandner, S. Kimme, Thomas Grashoff, U. Todt, A. Graf, Harald SchenkORCiD, C. Tulea, A. Lenenbach |
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ISBN: | 978-1-4799-1512-5 |
Title of the source (English): | International Conference on Optical MEMS and Nanophotonics Conference, OMN 2013, Proceedings, 18-22 August 2013, Kanazawa, Japan |
Publisher: | IEEE |
Place of publication: | Piscataway, NJ |
Document Type: | Conference Proceeding |
Language: | English |
Year of publication: | 2013 |
Contributing Corporation: | Fraunhofer IPMS |
First Page: | 83 |
Last Page: | 84 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Mikro- und Nanosysteme |
Institution name at the time of publication: | Fakultät für Mathematik, Naturwissenschaften und Informatik (eBTU) / LS Mikro- und Nanosysteme |