Influence of nitrogen on dislocation mobility in Czochralski silicon
Author: | V. I. Orlov, Yu. L. Iunin, M. V. Badylevich, O. Lysytskiy, H. Richter |
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ISSN: | 1012-0394 |
Title of the source (English): | Solid State Phenomena |
Document Type: | Article |
Language: | English |
Year of publication: | 2004 |
Volume/Year: | 95-96 |
First Page: | 465 |
Last Page: | 469 |
Comment: | Proceedings of the GADEST 2003 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Experimentalphysik und funktionale Materialien |
Institution name at the time of publication: | Fakultät für Mathematik, Naturwissenschaften und Informatik (eBTU) / LS Experimentalphysik / Materialwissenschaften |