Structural Mapping of Functional Ge Layers Grown on Graded SiGe Buffers for sub-10 nm CMOS Applications Using Advanced X-ray Nano-Diffraction
Author: | Marie-Ingrid Richard, Marvin Hartwig ZöllnerORCiD, Gilbert A. Chahine, Peter Zaumseil, Giovanni CapelliniORCiD, Maik HäberlenGND, Peter Storck, Tobias U. Schülli, Thomas Schröder |
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DOI: | https://doi.org/10.1021/acsami.5b08645 |
ISSN: | 1944-8244 |
ISSN: | 1944-8252 |
Title of the source (English): | ACS Applied Materials and Interfaces |
Document Type: | Scientific journal article peer-reviewed |
Language: | English |
Year of publication: | 2015 |
Volume/Year: | 7 |
Issue number: | 48 |
First Page: | 26696 |
Last Page: | 26700 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Halbleitermaterialien |