Strain and Lattice Orientation Distribution in SiN/Ge CMOS Compatible Light Emitters Microstructures by Quick X-ray Nano-diffraction Microscopy
Author: | Gilbert A. Chahine, Marvin Hartwig ZöllnerORCiD, Marie-Ingrid Richard, G. Subhajit, Peter Zaumseil, Giovanni CapelliniORCiD, Thomas Schroeder, Tobias U. Schülli |
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DOI: | https://doi.org/10.1063/1.4909529 |
ISSN: | 1077-3118 |
Title of the source (English): | Applied Physics Letters |
Document Type: | Scientific journal article peer-reviewed |
Language: | English |
Year of publication: | 2015 |
Volume/Year: | 106 |
First Page: | 071902-1 |
Last Page: | 071902-4 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Halbleitermaterialien |