Ion dynamics in capacitively coupled argon–xenon discharges
Author: | Maximilian Klich, Sebastian Wilczek, Jesper Frederikus Jacobus Janssen, Ralf Peter Brinkmann, Thomas MussenbrockORCiDGND, Jan TrieschmannORCiD |
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DOI: | https://doi.org/10.1088/1361-6595/ac02b0 |
ISSN: | 1361-6595 |
Title of the source (English): | Plasma Sources Science and Technology |
Document Type: | Scientific journal article peer-reviewed |
Language: | English |
Year of publication: | 2021 |
Volume/Year: | 30 |
Issue number: | 6 |
Article number: | 065019 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Theoretische Elektrotechnik |