Disparity between current and voltage driven capacitively coupled radio frequency discharges
Author: | Sebastian Wilczek, Jan TrieschmannORCiD, Julian SchulzeORCiD, Zoltan Donko, Ralf Peter Brinkmann, Thomas MussenbrockORCiDGND |
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DOI: | https://doi.org/10.1088/1361-6595/aae5c1 |
ISSN: | 1361-6595 |
ISSN: | 0963-0252 |
Title of the source (English): | Plasma Sources Science and Technology |
Document Type: | Scientific journal article peer-reviewed |
Language: | English |
Year of publication: | 2018 |
Volume/Year: | 27 |
Issue number: | 12 |
Number of pages: | 12 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Theoretische Elektrotechnik |