MetadatenAuthor: | Martin Kittler, Manfred Reiche, Hans-Michael Krause |
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DOI: | https://doi.org/10.4028/www.scientific.net/SSP.205-206.293 |
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Title of the source (English): | Gettering and defect engineering in semiconductor technology XV, selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22 - 27, 2013, Oxford, UK |
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Publisher: | Trans Tech Publ. |
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Place of publication: | Durnten-Zurich [u.a.] |
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Document Type: | Conference Proceeding |
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Language: | English |
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Year of publication: | 2014 |
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Contributing Corporation: | IHP, MPI Halle |
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First Page: | 293 |
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Last Page: | 298 |
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Series ; volume number: | Solid state phenomena ; 205/206 |
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Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Schaltkreisentwurf |
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Institution name at the time of publication: | Fakultät für Mathematik, Naturwissenschaften und Informatik (eBTU) / LS Schaltkreisentwurf |
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