• search hit 9 of 11
Back to Result List

Large-Signal Equivalent-Circuit Model of Asymmetric Electrostatic Transducers

  • This article presents a circuit model that is able to capture the full nonlinear behavior of an asymmetric electrostatic transducer whose dynamics are governed by a single degree of freedom. Effects such as stress-stiffening and pull-in are accounted for. The simulation of a displacement-dependent capacitor and a nonlinear spring is accomplished with arbitrary behavioral sources, which are a standard component of circuit simulators. As an application example, the parameters of the model were fitted to emulate the behavior of an electrostatic MEMS loudspeaker whose finite-element (FEM) simulations and acoustic characterisation where already reported in the literature. The obtained waveforms show good agreement with the amplitude and distortion that was reported both in the transient FEM simulations and in the experimental measurements. This model is also used to predict the performance of this device as a microphone, coupling it to a two-stage charge amplifier. Additional complex behaviors can be introduced to this network model if itThis article presents a circuit model that is able to capture the full nonlinear behavior of an asymmetric electrostatic transducer whose dynamics are governed by a single degree of freedom. Effects such as stress-stiffening and pull-in are accounted for. The simulation of a displacement-dependent capacitor and a nonlinear spring is accomplished with arbitrary behavioral sources, which are a standard component of circuit simulators. As an application example, the parameters of the model were fitted to emulate the behavior of an electrostatic MEMS loudspeaker whose finite-element (FEM) simulations and acoustic characterisation where already reported in the literature. The obtained waveforms show good agreement with the amplitude and distortion that was reported both in the transient FEM simulations and in the experimental measurements. This model is also used to predict the performance of this device as a microphone, coupling it to a two-stage charge amplifier. Additional complex behaviors can be introduced to this network model if it is required.show moreshow less

Export metadata

Additional Services

Search Google Scholar
Metadaten
Author: Jorge Mario Monsalve, Anton MelnikovORCiD, Bert Kaiser, David Schuffenhauer, Michael Stolz, Lutz Ehrig, Hermann Schenk, Holger Conrad, Harald SchenkORCiD
DOI:https://doi.org/10.1109/TMECH.2021.3112267
ISSN:1083-4435
ISSN:1941-014X
Title of the source (English):IEEE/ASME Transactions on Mechatronics
Document Type:Conference publication peer-reviewed
Language:English
Year of publication:2021
Tag:Acoustic electrostatic actuators; Acoustic transducers; Capacitors; Duffing oscillator; Electrostatics; Force; Integrated circuit modeling; Mathematical models; Microphones; Transducers; equivalent-circuit model; microactuators
Volume/Year:7
Issue number:5
First Page:2612
Last Page:2622
Faculty/Chair:Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Mikro- und Nanosysteme
Einverstanden ✔
Diese Webseite verwendet technisch erforderliche Session-Cookies. Durch die weitere Nutzung der Webseite stimmen Sie diesem zu. Unsere Datenschutzerklärung finden Sie hier.