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Proof of concept of an air-coupled electrostatic ultrasonic transducer based on lateral motion

  • An alternative implementation of an electrostatic MUT (Micromachined Ultrasonic Transducer), relying on multiple beams that displace along the chip’s surface instead of a single membrane displacing perpendicular to it, is presented in this work. With this approach, a design requiring a low bias voltage (24 V) and occupying a small area (3.3×3.3 mm², 2D/λ≈0.77) was shown to generate a sound pressure level of 82 dB (re. 20 µPa-rms) at 40 kHz and a distance of 8.9 cm. The high level of damping allows this transducer to operate in a wide frequency range (35-63 kHz). The operation of this device as an ultrasonic receiver was also proven. An implementation of this transducer as a rangefinder requires a strong reduction in the noise level, particularly coming from radio-frequency interference, in order to increase its detection range.

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Author: Jorge Mario Monsalve, Anton MelnikovORCiD, Michael Stolz, Andreas Mrosk, Marcel Jongmanns, Franziska Wall, Sergiu Langa, Ioana Marica-Bercu, Tim Brändel, Marco Kircher, Hermann A. G. Schenk, Bert Kaiser, Harald Schenk
DOI:https://doi.org/10.1016/j.sna.2022.113813
ISSN:1873-3069
ISSN:0924-4247
Title of the source (English):Sensors and Actuators A: Physical
Document Type:Scientific journal article peer-reviewed
Language:English
Year of publication:2022
Volume/Year:Vol. 345
Article number:113813
Way of publication:Open Access
Faculty/Chair:Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Mikro- und Nanosysteme
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