Characterization of ion beam modified polyimide layers
- Ion beam modified polyimide show high conductivity. In our investigation we focus on the electronic structure and the element composition, in order to understand the mechanism of conductivity. In our experiments we use the methods NEXAFS and PES. The measurements were done at the U49/2-PGM2 beam line of BESSY II, Berlin. We find an increase of the sp2 hybridized graphite contribution, after low Ar+ ion doses bombardment while the temperature of the samples is varied from 300 K to 650 K. In addition we follow the He+ bombardment induced changes by in-situ monitoring of the O1s, N1s content in the polyimide films.
Author: | Daniel Friedrich, Marcel Michling, Dieter SchmeißerORCiD, Yuri Koval, Paul Müller |
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URL: | http://www.dpg-verhandlungen.de/year/2010/conference/regensburg/part/ds/session/38/contribution/10 |
ISSN: | 0420-0195 |
Title of the source (German): | Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 45 |
Publisher: | Deutsche Physikalische Gesellschaft |
Place of publication: | Bad Honnef |
Document Type: | Conference Proceeding |
Language: | English |
Year of publication: | 2010 |
First Page: | S. 247 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Angewandte Physik und Halbleiterspektroskopie |
Institution name at the time of publication: | Fakultät für Mathematik, Naturwissenschaften und Informatik (eBTU) / LS Angewandte Physik / Sensorik |