Encapsulation of Capacitive Micromachined Ultrasonic Transducers Using Viscoelastic Polymer
Author: | Der-Song Lin, Xuefeng Zhuang, Serena H. Wong, Mario Kupnik, Butrus T. Khuri-Yakub |
---|---|
DOI: | https://doi.org/10.1109/JMEMS.2010.2076786 |
ISSN: | 1941-0158 |
Title of the source (English): | Journal of Microelectromechanical Systems |
Document Type: | Scientific journal article peer-reviewed |
Language: | English |
Year of publication: | 2010 |
Volume/Year: | 19 |
Issue number: | 6 |
First Page: | 1341 |
Last Page: | 1351 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Elektronische Systeme und Sensorik |
Institution name at the time of publication: | Fakultät für Maschinenbau, Elektrotechnik und Wirtschaftsingenieurwesen (eBTU) / LS Allgemeine Elektrotechnik und Messtechnik |