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Mesoporous thin-film on highly sensitive resonant chemical sensors for relative humidity and CO2 detection

  • Distributed sensing of gas-phase chemicals is a promising application for mesoporous materials when combined with highly sensitive miniaturized gas sensors. We present a direct application of a mesoporous silica thin film on a highly sensitive miniaturized resonant chemical sensor with a mass sensitivity at the zeptogram scale for relative humidity and CO2 detection. Using mesoporous silica thin-film, we report one of the lowest volume resolutions and a sensitive detection of 5.1 × 10–4% RH/Hz to water vapor in N2, which is 70 times higher than a device with a nontemplated silica layer. In addition, a mesoporous thin-film that is functionalized with an amino-group is directly applied on the resonant sensor, which exhibits a volume sensitivity of 1.6 × 10–4%/Hz and a volume resolution of 1.82 × 10–4% to CO2 in N2.

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Author: Hyunjoo J. Lee, Kwan Kyu Park, Mario Kupnik, Nicholas A. Melosh, Butrus T. Khuri-Yakub
DOI:https://doi.org/10.1021/ac300225c
ISSN:1520-6882
Title of the source (English):Analytical Chemistry
Document Type:Scientific journal article peer-reviewed
Language:English
Year of publication:2012
Volume/Year:84
Issue number:7
First Page:3063
Last Page:3066
Faculty/Chair:Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Elektronische Systeme und Sensorik
Institution name at the time of publication:Fakultät für Maschinenbau, Elektrotechnik und Wirtschaftsingenieurwesen (eBTU) / LS Allgemeine Elektrotechnik und Messtechnik
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