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Structural and Magnetic Studies on Iron Oxide and Iron-Magnesium Oxide Thin Films Deposited Using Ferrocene and (Dimethylaminomethyl)ferrocene Precursors

  • Iron oxide and magnesium-doped iron oxide films were grown by atomic layer deposition in the temperature range of 350–500 ◦C from ferrocene, (dimethylaminomethyl)ferrocene, magnesiumβ-diketonate, and ozone. Phase composition of the films depended on the deposition temperature, as magnetite and/or maghemite tended to form instead of hematite upon lowering the temperature. Iron oxide layers were also mixed with magnesium oxide by alternate deposition of MgO and Fe2O3 which also favored the formation of magnetite or maghemite structure prior to hematite. Scanning electron microscopy implied the smoothening of the films after doping with magnesium oxide. Magnetometry was used to study the effects of temperature and doping levels on the magnetic properties of the films.

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Author: Kaupo Kukli, Mukesh Chandra Dimri, Aile Tamm, Marianna Kemell, Tanel Käämbre, Marko Vehkamäki, Manjunath Puttaswamy, Raivo Stern, Ivar Kuusik, Arvo Kikas, Massimo TallaridaORCiD, Dieter SchmeißerORCiD, Mikko Ritala, Markku Leskelä
DOI:https://doi.org/10.1149/2.004303jss
ISSN:2162-8769
Title of the source (English):ECS Journal of Solid State Science and Technology
Document Type:Scientific journal article peer-reviewed
Language:English
Year of publication:2013
Tag:GIXRD; Raman spectroscopy; X-Ray absorption spectroscopy (XAS); iron magnesium oxide; iron oxide; magnetization; scanning electron microscopy (SEM)
Volume/Year:2
Issue number:3
First Page:N45
Last Page:N54
Faculty/Chair:Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Angewandte Physik und Halbleiterspektroskopie
Institution name at the time of publication:Fakultät für Mathematik, Naturwissenschaften und Informatik (eBTU) / LS Angewandte Physik / Sensorik
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