Translatory MEMS actuator and their system integration for miniaturized Fourier transform spectrometers
Author: | Thilo Sandner, Thomas Grashoff, Harald SchenkORCiD, Andreas Kenda |
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DOI: | https://doi.org/10.1117/12.909817 |
ISBN: | 978-0-8194-8930-2 |
Title of the source (English): | SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012 |
Publisher: | SPIE Press |
Place of publication: | Bellingham |
Document Type: | Conference Proceeding |
Language: | English |
Year of publication: | 2012 |
Contributing Corporation: | Fraunhofer IPMS |
Edition: | 1. Auflage |
First Page: | 82520C-1 |
Last Page: | 82520C-10 |
Series ; volume number: | Proceedings of SPIE ; 8252 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Mikro- und Nanosysteme |
Institution name at the time of publication: | Fakultät für Mathematik, Naturwissenschaften und Informatik (eBTU) / LS Mikro- und Nanosysteme |