About stress in filled DRIE-trenches
Author: | Bert Kaiser, Thomas Grashoff, Christian Drabe, Holger Conrad, Harald SchenkORCiD |
---|---|
URL: | http://iopscience.iop.org/article/10.1088/0960-1317/25/8/085003 |
ISSN: | 0960-1317 |
Title of the source (English): | Journal of Micromechanics and Microengineering (JMM) |
Document Type: | Scientific journal article peer-reviewed |
Language: | English |
Year of publication: | 2015 |
Volume/Year: | 25 |
Issue number: | 8 |
First Page: | 8085003 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Mikro- und Nanosysteme |