Electrostatic bending actuators with liquid filled nanometer scale gap
Author: | Matthieu Gaudet, Sebastian Uhlig, Michael Stolz, S. Arscott, Holger Conrad, Sergiu Langa, Bert Kaiser, Harald SchenkORCiD |
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URL: | http://ieeexplore.ieee.org/document/7863369/ |
ISBN: | 978-1-5090-5078-9 |
ISBN: | 978-1-5090-5079-6 |
Title of the source (English): | MEMS 2017, the 30th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, Nevada, USA, January 22-26 2017 |
Publisher: | IEEE |
Place of publication: | Piscataway, NJ |
Document Type: | Conference Proceeding |
Language: | English |
Year of publication: | 2017 |
First Page: | 175 |
Last Page: | 178 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Mikro- und Nanosysteme |