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Audio-Transducer für In-Ear-Anwendungen auf der Basis CMOS-kompatibler, elektrostatischer Biegeaktoren

  • Recently an innovative mSpeaker technology, based on a novel kind of CMOS compatible small gap electrostatic actuators for large deflection, has been introduced [1]. In this paper, we devise methods to model such speakers in terms of lumped parameters using the deflection of the beam centre as sole dynamic variable. Optical, acoustical and finite element methods (FEM) are used to validate the non-linear lumped parameter model (LPM). The experimental evaluation and LPM simulations of the total harmonic distortion reveal deeper insights into the mechanisms governing linearity.

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Author: Barbara Spitz, Franziska Wall, Hermann Schenk, Anton MelnikovORCiD, Lutz Ehrig, Sergiu Langa, Michael Stolz, Bert Kaiser, Holger Conrad, Harald SchenkORCiD, Wolfram Pufe
Title of the source (German):MikroSystemTechnik-Kongress, Berlin, Germany, 2019
Publisher:VDE-Verlag
Document Type:Conference publication peer-reviewed
Language:German
Year of publication:2019
First Page:54
Last Page:57
Faculty/Chair:Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Mikro- und Nanosysteme
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