Acoustic validation of electrostatic all-silicon MEMS-speakers
Author: | Lutz Ehrig, Bert Kaiser, Hermann Schenk, Michael Stolz, Sergiu Langa, Holger Conrad, Harald SchenkORCiD, Andreas Männchen, Tobias Brocks |
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URL: | https://www.aes.org/e-lib/browse.cfm?elib=20522 |
DOI: | https://doi.org/10.17743/aesconf.2019.978-1-942220-29-9 |
Title of the source (English): | AES International Conference on Headphone Technology, San Francisco, New York, USA, 2019 |
Document Type: | Conference publication not peer-reviewed |
Language: | English |
Year of publication: | 2019 |
Article number: | Paper 10 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Mikro- und Nanosysteme |