Comparison of Fluorinated and Non-Fluorinated Novel Low-k Polycyanurates for Integrated Circuit (IC) Metallization
Author: | Monika BauerGND, Christian DreyerORCiD, Olaf Kahle, U. Schuldt, C. Uhlig, K. Schulze, Stefan E. Schulz, M. Uhlig, Thomas Geßner |
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Document Type: | Conference Proceeding |
Language: | English |
Year of publication: | 2006 |
Quelle aus UBICO: | Fluoropolymer 2006, Preprints |
Faculty/Chair: | Fakultät 2 Umwelt und Naturwissenschaften / FG Polymermaterialien |
Institution name at the time of publication: | Fakultät für Mathematik, Naturwissenschaften und Informatik (eBTU) / LS Polymermaterialien |