Combined experimental and theoretical description of direct current magnetron sputtering of Al by Ar and Ar/N₂ plasma
Author: | Jan TrieschmannORCiD, Stefan Ries, Nikita Bibinov, Peter AwakowiczGND, Stanislav Mráz, Jochen M. Schneider, Thomas MussenbrockORCiDGND |
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DOI: | https://doi.org/10.1088/1361-6595/aac23e |
Title of the source (English): | Plasma Sources Science and Technology |
Document Type: | Scientific journal article peer-reviewed |
Language: | English |
Year of publication: | 2018 |
Volume/Year: | 27 |
Issue number: | 5 |
Number of pages: | 14 |
Article number: | ID 054003 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Theoretische Elektrotechnik |