Neutral Gas Simulation on the Influence of Rotating Spokes on Gas Rarefaction in High-Power Impulse Magnetron Sputtering
Author: | Jan TrieschmannORCiD |
---|---|
DOI: | https://doi.org/10.1002/ctpp.201700062 |
ISSN: | 1521-3986 |
Title of the source (English): | Contributions to Plasma Physics |
Document Type: | Scientific journal article peer-reviewed |
Language: | English |
Year of publication: | 2018 |
Volume/Year: | 58 |
Issue number: | 5 |
First Page: | 394 |
Last Page: | 403 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Theoretische Elektrotechnik |