Species transport on the target during high power impulse magnetron sputtering
Author: | Vincent Layes, Sascha Monje, Carles Corbella, Jan TrieschmannORCiD, Teresa de los Arcos, Achim von Keudell |
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DOI: | https://doi.org/10.1063/1.4976999 |
ISSN: | 1077-3118 |
Title of the source (English): | Applied Physics Letters |
Document Type: | Scientific journal article peer-reviewed |
Language: | English |
Year of publication: | 2017 |
Volume/Year: | 110 |
Issue number: | 8 |
Number of pages: | 4 |
Article number: | ID 081603 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Theoretische Elektrotechnik |