Ellipsometric analysis of concentration gradients induced in semiconductor crystals by pulsed laser induced epitaxy
Author: | Jon Schlipf, Elena Martin, Michel Stchakovsky, Alessandro Benedetti, Inga Anita FischerORCiD, Jörg Schulze, Stefano Chiussi |
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DOI: | https://doi.org/10.1116/1.5122777 |
ISSN: | 2166-2754 |
Title of the source (English): | Journal of Vacuum Science & Technology B |
Document Type: | Scientific journal article peer-reviewed |
Language: | English |
Year of publication: | 2019 |
Volume/Year: | 37 |
Issue number: | 6 |
Article number: | 061213 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Experimentalphysik und funktionale Materialien |