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Wide pressure range operation of air-coupled CMUTs

  • We present measurement results of capacitive micromachined ultrasonic transducers (CMUTs)in permanent contact mode over a wide pressure range(1 – 8 atm). The CMUT plates are in contact with the bottom of the cavities due to atmospheric pressure, even without any dc bias voltage. The electrical input impedance at various dc bias voltages are measured at elevated pressure to characterize individual devices. The open and short circuit resonant frequencies are extracted from the impedance data, and the acoustic performance of pairs of devices is evaluated by performing pitch-catch measurements. A frequency matching method is proposed and used to determine the optimal dc bias voltages for the transmitting and receiving CMUTs individually. Our electrical impedance results show good agreement with the finite element model results (modal and harmonic analysis performed with ANSYS) over the entire pressure range. Moreover, the pitch-catch measurement results validate the proposed frequency matching method for an optimal biasing scheme,We present measurement results of capacitive micromachined ultrasonic transducers (CMUTs)in permanent contact mode over a wide pressure range(1 – 8 atm). The CMUT plates are in contact with the bottom of the cavities due to atmospheric pressure, even without any dc bias voltage. The electrical input impedance at various dc bias voltages are measured at elevated pressure to characterize individual devices. The open and short circuit resonant frequencies are extracted from the impedance data, and the acoustic performance of pairs of devices is evaluated by performing pitch-catch measurements. A frequency matching method is proposed and used to determine the optimal dc bias voltages for the transmitting and receiving CMUTs individually. Our electrical impedance results show good agreement with the finite element model results (modal and harmonic analysis performed with ANSYS) over the entire pressure range. Moreover, the pitch-catch measurement results validate the proposed frequency matching method for an optimal biasing scheme, and a received signal with good signal-to-noise ratio of 45 dB was observed at a pressure of 7 atm. In conclusion, the behavior of CMUTs in permanent contact mode can be predicted well with our FEA, and they are indeed a promising solution in providing ultrasonic transducers that can operate over a wide pressure range.show moreshow less

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Metadaten
Author: Min-Chieh Ho, Mario Kupnik, Kwan Kyu Park, Kristian Eckhoff, Butrus T. Khuri-Yakub
DOI:https://doi.org/10.1109/ULTSYM.2012.0023
ISBN:978-1-4673-4561-3
Title of the source (English):IEEE International Ultrasonics Symposium, Dresden, Germany, 7 - 10 October 2012
Publisher:IEEE
Place of publication:Piscataway, NJ
Document Type:Conference Proceeding
Language:English
Year of publication:2012
First Page:93
Last Page:96
Faculty/Chair:Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Elektronische Systeme und Sensorik
Institution name at the time of publication:Fakultät für Maschinenbau, Elektrotechnik und Wirtschaftsingenieurwesen (eBTU) / LS Allgemeine Elektrotechnik und Messtechnik
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