Analytic model of the energy distribution for energetic electrons in HiPIMS
Author: | Sara Gallian, Jan TrieschmannORCiD, Thomas MussenbrockORCiDGND, William N. G. Hitchon, Ralf Peter Brinkmann |
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DOI: | https://doi.org/10.1109/PLASMA.2015.7179892 |
ISBN: | 978-1-4799-6974-6 |
Title of the source (English): | 2015 IEEE International Conference on Plasma Sciences (ICOPS), 24 - 28 May 2015, Belek, Antalya, Turkey |
Publisher: | IEEE |
Place of publication: | Piscataway, NJ |
Document Type: | Conference Proceeding |
Language: | English |
Year of publication: | 2015 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Theoretische Elektrotechnik |