MetadatenAuthor: | Anton MelnikovORCiD, Hermann Schenk, Franziska Wall, Barbara Spitz, Lutz Ehrig, Sergiu Langa, Bert Kaiser, Holger Conrad, Harald SchenkORCiD, Michael Stolz |
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DOI: | https://doi.org/10.1117/12.2551271 |
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Title of the source (English): | SPIE Conference: MOEMS and Miniaturized Systems XIX, San Francisco, USA, 2020, Proc. SPIE 11293 |
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Document Type: | Conference publication not peer-reviewed |
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Language: | English |
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Year of publication: | 2020 |
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Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Mikro- und Nanosysteme |
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