Micro mirrors for high-speed laser deflections and patterning
Author: | Harald SchenkORCiD, Jan Grahmann, Thilo Sandner, Michael Wagner, Ulrike Dauderstädt, Jan-Uwe Schmidt |
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DOI: | https://doi.org/10.1016/j.phpro.2014.08.090 |
ISSN: | 1875-3892 |
Title of the source (English): | Physics Procedia |
Document Type: | Scientific journal article not peer-reviewed |
Language: | English |
Year of publication: | 2014 |
Volume/Year: | 56 |
First Page: | 7 |
Last Page: | 18 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Mikro- und Nanosysteme |
Institution name at the time of publication: | Fakultät für Mathematik, Naturwissenschaften und Informatik (eBTU) / LS Mikro- und Nanosysteme |