Micromechanical devices with mechanical actuators
Author: | Holger Conrad, Matthieu Gaudet, Harald SchenkORCiD, Sebastian Uhlig |
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URL: | https://www.freepatentsonline.com/11639718.html |
Document Type: | Patent |
Language: | English |
Year of publication: | 2023 |
Patent number: | US 11,639,718 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Mikro- und Nanosysteme |