MetadatenAuthor: | Holger Conrad, Bert Kaiser, Matthieu Gaudet, Sergiu Langa, Michael Stolz, Sebastian Uhlig, Klaus Schimmanz, Harald SchenkORCiD |
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DOI: | https://doi.org/10.1016/j.proeng.2016.11.454 |
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ISSN: | 1877-7058 |
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Title of the source (English): | Procedia Engineering |
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Document Type: | Scientific journal article peer-reviewed |
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Language: | English |
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Year of publication: | 2016 |
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Volume/Year: | 168 |
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First Page: | 1533 |
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Last Page: | 1536 |
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Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Mikro- und Nanosysteme |
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