MetadatenAuthor: | Ahsan Hayat, Davide Spirito, Agnieszka Anna Corley-WiciakORCiD, Markus Andreas Schubert, Maria Masood, Felix Reichmann, Markus Ratzke, Giovanni CapelliniORCiD, Inga Anita FischerORCiD |
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DOI: | https://doi.org/10.1016/j.mssp.2023.107693 |
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ISSN: | 1873-4081 |
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Title of the source (English): | Materials Science in Semiconductor Processing |
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Document Type: | Scientific journal article peer-reviewed |
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Language: | English |
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Year of publication: | 2023 |
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Volume/Year: | 165 |
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Article number: | 107693 |
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Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Experimentalphysik und funktionale Materialien |
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