MetadatenAuthor: | Lena Bischoff, Gerrit Hübner, Ihor Korolov, Zoltán Donkó, Peter Hartmann, Timo Gans, Julian Held, Volker Schulz-von der Gathen, Yue Liu, Thomas MussenbrockORCiDGND, Julian SchulzeORCiD |
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DOI: | https://doi.org/10.1088/1361-6595/aaf35d |
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ISSN: | 1361-6595 |
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ISSN: | 0963-0252 |
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Title of the source (English): | Plasma Sources Science and Technology |
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Document Type: | Scientific journal article peer-reviewed |
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Language: | English |
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Year of publication: | 2018 |
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Volume/Year: | 27 |
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Issue number: | 12 |
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Number of pages: | 16 |
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Article number: | 125090 |
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Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Theoretische Elektrotechnik |
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