Formation of atomically smooth, ultrathin oxides on Si(113)
Author: | Hans-Joachim Müssig, Jarek Marek Dabrowski, S. Hinrich |
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ISSN: | 0038-1101 |
Title of the source (German): | Solid state electronics |
Document Type: | Scientific journal article peer-reviewed |
Language: | English |
Year of publication: | 2001 |
Volume/Year: | 45 |
Issue number: | 8 |
First Page: | 1219 |
Last Page: | 1231 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Systeme |
Institution name at the time of publication: | Fakultät für Mathematik, Naturwissenschaften und Informatik (eBTU) / LS Systeme |