Design an fabrication of a tunable two-fluid micro-lens device with a large deflection polymer actuator
- A large deflection polymer bending actuator was employed in the design of an integrated micro-lens with electrically adjustable focal length. This micro-lens consisted of micro-fluidic chambers bonded together and sealed by an elastomeric lens membrane to which the polymer actuator has been attached. For focal length optimization, the chambers could be filled with fluids of different refractive indices. The multilayered actuator of radial shape and the variable micro-lens chip design were optimized using 2D FEM simulations. Fabrication steps included bonding of polymer actuator stack with the elastomeric lens membrane on a micro-machined silicon wafer. For a tunable micro-lens with 3 mm aperture, a tuning range in optical power between 0 and more than 15 dpt was achieved.
Author: | Christian Schirrmann, Florenta Adriana CostacheGND, Kirstin Bornhorst, Boscij Pawlik, Andreas Rieck, Harald SchenkORCiD |
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ISSN: | 1877-7058 |
Title of the source (English): | Procedia Engineering |
Document Type: | Scientific journal article peer-reviewed |
Language: | English |
Year of publication: | 2014 |
Contributing Corporation: | Fraunhofer IPMS |
Issue number: | 87 |
First Page: | 1553 |
Last Page: | 1556 |
Comment: | Eurosensors XXVIII - The 28th European Conference on Solid-State Transducers 2014 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Mikro- und Nanosysteme |
Institution name at the time of publication: | Fakultät für Mathematik, Naturwissenschaften und Informatik (eBTU) / LS Mikro- und Nanosysteme |