AlN/SiO2/Si3N4/Si(100) based CMOS compatible surface acoustic wave filter with -12.8 dB minimum insertion loss
Author: | Udo Christian Kaletta, Christian Wipf, Mirko Fraschke, Dirk Wolansky, Markus Andreas Schubert, Thomas Schroeder, Christian WengerORCiD |
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DOI: | https://doi.org/10.1109/TED.2015.2395443 |
ISSN: | 0018-9383 |
Title of the source (English): | IEEE Transactions on Electron Devices |
Document Type: | Scientific journal article peer-reviewed |
Language: | English |
Year of publication: | 2015 |
Volume/Year: | 62 |
Issue number: | 3 |
First Page: | 764 |
Last Page: | 768 |
Faculty/Chair: | Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Halbleitermaterialien |